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To obtain spherical MoNbTaWZr powders, porous agglomerated MoNbTaWZr particles prepared by spray granulation were subsequently processed by plasma spheroidization. The microstructure, morphology, particle size distribution, purity and property of each step during process were systematically investigated. Results show that the obtained spherical MoNbTaWZr powder has dense structure, smooth surface, and good sphericity in shape. It also has narrow particle size distribution, while D 10 , D 50 , D 90 and D av were 32.0 µm, 42.3 µm, 56.0 µm and 43.2 µm, respectively. The powder has a high purity, and the concentration of oxygen, hydrogen, carbon, and nitrogen were all at ppm. In addition, excellent flowability (8.89 s/50 g) and apparent density (7.27 g/cm3) are benefit from high spheroidization ratio (98.4 %) and dense structure. The spherical powder also exhibits a high nano-hardness due to solid solution strengthening and refinement in dendritic structures. ● Spherical MoNbTaWZr powder was successfully prepared by spray granulation combined with plasma spheroidization. ● Morphology, microstructure, particle size, and purity during preparation were systematic investigated. ● The obtained powder has narrow size distribution, high purity, and good flowability. ● High purity benefits from deoxidation during spheroidization process. [ABSTRACT FROM AUTHOR]