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In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and refine the resonator geometry and transduction. In proper FEA or analytical modeling, the explicit description and accurate values of the effective mass and stiffness of the resonator structure are needed. Therefore, here we outlined an analytical model approach to calculate those values using the first principles of kinetic and potential energy analyses. The natural frequencies of the structure were then calculated using those parameters and compared with those that were simulated using the FEA tool ANSYS. Dynamic analysis was performed to calculate the pull-in voltage, shift of resonance frequency, and harmonic analyses of the ring to understand how the ring resonator is affected by the applied voltage. Additional analysis was performed for different orientations of silicon and assessing the frequency response and frequency shifts. The prototype was fabricated using the standard silicon-on-insulator (SOI)-based MEMS fabrication process and the experimental results for resonances showed good agreement with the developed model approach. The model approach presented in this paper can be used to provide valuable insights for the optimization of MEMS resonators for various operating conditions. [ABSTRACT FROM AUTHOR]

The detection of electric fields in the environment has great importance for understanding various natural phenomena, environmental monitoring, and ensuring human safety. This review paper provides an overview of the current state-of-the-art technologies utilized for sensing electric fields in the environment, the challenges encountered, and the diverse applications of this sensing technology. The technology is divided into three categories according to the differences in the physical mechanism: the electro-optic effect-based measurement system, the MEMS-based sensor, and the newly reported quantum effect-based sensors. The principles of the underlying methods are comprehensively introduced, and the tentative applications for each type are discussed. Detailed comparisons of the three different techniques are identified and discussed with regard to the instrument, its sensitivity, and bandwidth. Additionally, the challenges faced in environmental electric field sensing, the potential solutions, and future development directions are addressed. [ABSTRACT FROM AUTHOR]

In this paper, we present a bolt preload monitoring system, including the system architecture and algorithms. We show how Finite Element Method (FEM) simulations aided the design and how we processed signals to achieve experimental validation. The preload is measured using a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) in pulse-echo mode, by detecting the Change in Time-of-Flight (CTOF) of the acoustic wave generated by the PMUT, between no-load and load conditions. We performed FEM simulations to analyze the wave propagation inside the bolt and understand the effect of different configurations and parameters, such as transducer bandwidth, transducer position (head/tip), presence or absence of threads, as well as the frequency of the acoustic waves. In order to couple the PMUT to the bolt, a novel assembly process involving the deposition of an elastomeric acoustic impedance matching layer was developed. We achieved, for the first time with PMUTs, an experimental measure of bolt preload from the CTOF, with a good signal-to-noise ratio. Due to its low cost and small size, this system has great potential for use in the field for continuous monitoring throughout the operative life of the bolt. [ABSTRACT FROM AUTHOR]

This paper reports a self-temperature compensation barometer based on a quartz resonant pressure sensor. A novel sensor chip that contains a double-ended tuning fork (DETF) resonator and a single-ended tuning fork (SETF) resonator is designed and fabricated. The two resonators are designed on the same diaphragm. The DETF resonator works as a pressure sensor. To reduce the influence of the temperature drift, the SETF resonator works as a temperature compensation sensor, which senses the instantaneous temperature of the DETF resonator. The temperature compensation method based on polynomial fitting is studied. The experimental results show that the accuracy is 0.019% F.S. in a pressure range of 200~1200 hPa over a temperature range of −20 °C~+60 °C. The absolute errors of the barometer are within ±23 Pa. To verify its actual performance, a drone flight test was conducted. The test results are consistent with the actual flight trajectory. [ABSTRACT FROM AUTHOR]

In this paper, a MEMS piezoresistive ultrathin silicon membrane-based strain sensor is presented. The sensor's ability to capture an acoustic emission signal is demonstrated using a Hsu–Nielsen source, and shows comparable frequency content to a commercial piezoceramic ultrasonic transducer. To the authors' knowledge, this makes the developed sensor the first known piezoresistive strain sensor which is capable of recording low-energy acoustic emissions. The improvements to the nondestructive evaluation and structural health monitoring arise from the sensor's low minimum detectable strain and wide-frequency bandwidth, which are generated from the improved fabrication process that permits crystalline semiconductor membranes and advanced polymers to be co-processed, thus enabling a dual-use application of both acoustic emission and static strain sensing. The sensor's ability to document quasi-static bending is also demonstrated and compared with an ultrasonic transducer, which provides no significant response. This dual-use application is proposed to effectively combine the uses of both strain and ultrasonic transducer sensor types within one sensor, making it a novel and useful method for nondestructive evaluations. The potential benefits include an enhanced sensitivity, a reduced sensor size, a lower cost, and a reduced instrumentation complexity. [ABSTRACT FROM AUTHOR]

Silicon nanowires (SiNWs) are emerging as versatile components in the fabrication of sensors for implantable medical devices because of their exceptional electrical, optical, and mechanical properties. This paper presents a novel top-down fabrication method for vertically stacked SiNWs, eliminating the need for wet oxidation, wet etching, and nanolithography. The integration of these SiNWs into body channel communication (BCC) circuits was also explored. The fabricated SiNWs were confirmed to be capable of forming arrays with multiple layers and rows. The SiNW-based pH sensors demonstrated a robust response to pH changes, and when tested with BCC circuits, they showed that it was possible to quantize based on pH when transmitting data through the human body. This study successfully developed a novel method for SiNW fabrication and integration into BCC circuits, which could lead to improvements in the reliability and efficiency of implantable medical sensors. The findings demonstrate significant potential for bioelectronic applications and real-time biochemical monitoring. [ABSTRACT FROM AUTHOR]

Micromachined electric field mills have received much interest for the measurement of DC fields; however, conventional designs with lateral moving shutters could have shutter lifting in the presence of strong fields, which affects their performance. This paper presents a MEMS electric field mill utilizing a vertical movement shutter to address this issue. The sensor is designed and fabricated based on a flexible PCB substrate and is released using a laser-cutting process. The movement of the shutter is driven by an electrostatic actuator. When the driving signal is a sine wave, the shutter moves in the same direction during both the positive and negative half-periods. This facilitates the application of a lock-in amplifier to synchronize with the signal at twice the frequency of the driving signal. In experimental testing, when the vertical shutter is driven at a resonance of 840 Hz, the highest sensitivity of the sensor is achieved and is measured to be 5.1 V/kVm−1. The sensor also demonstrates a good linearity of 1.1% for measuring DC electric fields in the range of 1.25 kV/m to 25 kV/m. [ABSTRACT FROM AUTHOR]