1. Extreme ultraviolet broadband Mo/Y multilayer analyzers.
- Author
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Wang, Zhanshan, Wang, Hongchang, Zhu, Jingtao, Xu, Yao, Zhang, Shumin, Li, Cunxia, Wang, Fengli, Zhang, Zhong, Wu, Yongrong, Cheng, Xinbin, Chen, Lingyan, Michette, Alan G., Pfauntsch, Slawka J., Powell, A. Keith, Schäfers, Franz, Gaupp, Andreas, and MacDonald, Mike
- Subjects
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MOLYBDENUM , *YTTRIUM , *POLARIMETRY , *SPUTTERING (Physics) , *REFLECTANCE - Abstract
Broadband extreme ultraviolet molybdenum/yttrium aperiodic multilayer analyzers were designed for polarization experiments in 8.5–11.7 nm wavelength range. The multilayer analyzers were made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility. Measured s reflectivities at the Brewster angle are 5.5% for a multilayer designed for 8.5–10.1 nm wavelength range and 6.1% for one designed for 9.1–11.7 nm. The multilayers also exhibit high polarization degree up to 98.79%. In addition, the multilayer was also measured over 38°–52° angular range at the fixed wavelength of 10.2 nm and the mean s reflectivity is 6.2%. [ABSTRACT FROM AUTHOR]
- Published
- 2006
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