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This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ω μm, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero‐engine, and the vibration signal of the turbine components and the test bed was successfully extracted. © 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC. [ABSTRACT FROM AUTHOR]

Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios. [ABSTRACT FROM AUTHOR]