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Electrochemical micromachining (EMM) has become a popular technology for fabricating microscale structures. To obtain higher machining localization and minor stray corrosion, a new hybrid EMM process combining air assistance and ultrasonic assistance was introduced in this paper. Simulations and experimental investigations were conducted to study the influencing mechanism and the influencing characteristics of the assisting process energies. In the multi-physics model, a reactant transport model is included, and the direct coupling between the assisting processes and the electrochemical process is achieved. Results indicate that, when the two assisting processes are applied separately, the assisting effect tend to act on the entire workpiece surface, either promotes the overall dissolution or inhibits it, usually leading to unsatisfactory results; by combining the two assisting processes, synergistic effect occurs: dissolution in the central area is promoted by the ultrasonic assistance, while stray corrosion in the margin area is hindered by the air assistance. Thus, microstructures with enhanced aspect ratio and reduced stray corrosion can be fabricated. The results also show that the surrounding airflow can produce an electrical insulating effect on both the workpiece and the cathode. When the air pressure is low, an additional concentrating effect on the electric field can be observed; however, a high air pressure leads to a greatly hindered dissolution. When the applied amplitude is appropriate, ultrasonic assistance promotes the electrochemical dissolution through disturbance effect and cavitation phenomena. But if the amplitude is too large, massive cavitation bubbles will inhibit the dissolution greatly. [ABSTRACT FROM AUTHOR]

Micro-structure on metal surface can be created with high precision and good surface quality by ultrasonic-assisted electrochemical micromachining (USEMM). One of the prevalent material removal mechanisms in ultrasonic machining (UM) is cavitation erosion. However, the mechanism of material erosion is not clear and worth investigating. This study of the mechanical and chemical effects of the ultrasonic vibration on the 6061 aluminum alloy is targeted to reveal the material processing mechanism in USEMM. Based on the built model, the velocity of micro-jet produced near the workpiece surface by ultrasonic cavitation reaches up to 350 m/s when bubble collapses computed by software MATLAB. The impact of micro-jet produces plastic micro-pits on the metal surface and the convex peak around the edge of the pits, which is verified in ABAQUS software. The metallographic microscope and curves of the electrochemical polarization behavior results indicate a significant grain refinement and a marked increase of anodic dissolution current, as well as a weaker resistance than the original workpiece in NaNO3 electrolyte during UM. The current-time curve during machining demonstrates the passive layer forms on the metal surface and then breaks down at the time of less than 0.0066s in USEMM. Micrographs of scanning electron microscope (SEM) of the machined surface in different stages show that many uniform and flat pits are formed in USEMM, compared with the local uneven pits in EMM. [ABSTRACT FROM AUTHOR]