1. Thermally oxidized formation of new Ge dots over as-grown Ge dots in the Si capping layer.
- Author
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Nie, Tian-Xiao, Lin, Jin-Hui, Chen, Zhi-Gang, Shao, Yuan-Min, Wu, Yue-Qin, Yang, Xin-Ju, Fan, Yong-Liang, Jiang, Zui-Min, and Zou, Jin
- Subjects
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GERMANIUM , *QUANTUM dots , *CRYSTAL growth , *SURFACES (Physics) , *MOLECULAR beam epitaxy - Abstract
A Si-capped Ge quantum dot sample was self-assembly grown via Stranski-Krastanov mode in a molecular beam epitaxy system with the Si capping layer deposited at 300 °C. After annealing the sample in an oxygen atmosphere at 1000 °C, a structure, namely two layers of quantum dots, was formed with the newly formed Ge-rich quantum dots embedded in the oxidized matrix with the position accurately located upon the as-grown quantum dots. It has been found that the formation of such nanostructures strongly depends upon the growth temperature and oxygen atmosphere. A growth mechanism was proposed to explain the formation of the nanostructure based on the Ge diffusion from the as-grown quantum dots, Ge segregation from the growing oxide, and subsequent migration/agglomeration. [ABSTRACT FROM AUTHOR]
- Published
- 2011
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