1. Investigation of pinholes in Czochralski silicon ingots in relation to structure loss.
- Author
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Sortland, Øyvind S., Øvrelid, Eivind J., M'Hamdi, Mohammed, and Di Sabatino, Marisa
- Subjects
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LINE defects (Crystallography) , *SILICON , *SEMICONDUCTORS , *ETCHING reagents , *SINGLE crystals - Abstract
Highlights • The gas in a pinhole was Ar, which likely came from the furnace atmosphere. • The pinholes did not affect the arrangement of dislocation etch pits. • Pinhole frequency before structure loss is not higher than without structure loss. • There were no indication that pinholes caused structure loss in seven ingots. • Modeling gives a stress concentration factor of at most 2.1 around pinhole. Abstract In the production of monocrystalline silicon by the Czochralski process, structure loss frequently reduces yield and increases production time. Structure loss means the transition from monocrystalline to multicrystalline structure. It is typically preceded by generation of dislocations and slip. Previous work concluded that a pinhole (i.e. a cavity from gas bubble in the melt) was the main cause of structure loss in an n-type Czochralski ingot. In the present study, seven industrial n-type Czochralski silicon ingots were investigated to assess whether pinholes frequently contribute to cause structure loss. Pinholes were found within 5 cm above the position where dislocations were generated in four out of the seven ingots. Slices were cut with the pinholes at one surface and etched with Sopori etchant. The pinholes did not appear to have affected the arrangements of etch pits in these samples and investigation of pinholes did not reveal the cause of structure loss. Furthermore, there were not significantly higher pinhole frequency before structure loss compared to ingots without structure loss among 4041 industrial ingots. Modeling of thermal stresses showed stress concentration around a pinhole, and it gives new insight into the level of stress the ingot can endure without generating dislocations and slip. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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