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Most of the applications of solidly mounted resonator need the compensation of temperature coefficient of resonant frequency. The presence of materials with different properties in the stack makes it complicated to explain the influence of each material individually on temperature coefficient. To reduce design and fabrication costs, an accurate and precise modeling of the resonators is required. In this paper, Mason model and finite-element analysis are used to design the resonators and results for both models, which are almost similar, are presented. Different kinds of configuration (symmetric and asymmetric, according to the thickness of the layers) are designed to achieve the temperature coefficient of frequency as near-zero as possible with an optimized response. Such designs are fabricated and characterized obtaining measurements of the temperature coefficient of frequency. The result shows that useful and reliable information on the performance of resonators can be achieved with accurate modeling. [2017-0107] [ABSTRACT FROM PUBLISHER]

We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying the pressure, the cathode power and the temperature of a two-step process based on depositing (00·2)-tilted AlN active layers over an (10·3)-oriented AlN seed layer. To minimize the influence of the temperature coefficient of frequency on the stability of the biosensor, we use insulating acoustic mirrors made of layers of SiO 2 and amorphous TaO x with non-λ/4 thicknesses, which enables to reduce the TCF to −14 ppm/°C. The mass loading of the resonators with SiO 2 thin films results in a sensitivity of 1800 kHz/pg·cm 2 . Surface functionalization consists on the binding of silane groups on plasma oxidized SiO 2 surfaces. After a glutaraldehyde link, streptavidin is bonded to the surface to receive biotinylated receptors for several species. We test thrombin-binding aptamer (TBA29 against thrombin, and IgG antibody against immunoglobulin). The sensors response to species of different molecular weight like TBA-29 (9.75 kDa) or IgG antibody (150 kDa) is monitored. Finally, we assess the response of the biosensors to different thrombin concentrations (ranging from 4 nM to 270 nM) on surfaces functionalized with the TBA29 aptamer. [ABSTRACT FROM AUTHOR]

A thickness longitudinal mode (TLM) thin film bulk acoustic resonator biosensor is demonstrated to operate in water with a high quality-factor, Q . This is achieved using a layer of carbon nanotubes (CNTs) on top of the resonator which has a significantly different acoustic impedance to either the resonator or liquid whilst being susceptible to the binding of biological molecules. This allows the resonance to be decoupled from direct energy loss into the liquid, although still retaining mass sensitivity. AlN solidly mounted resonators (SMRs) having a thickness shear mode (TSM) at 1.1 GHz and TLM at 1.9 GHz are fabricated. CNTs with different forest densities are grown by chemical vapor deposition on the active area with Fe as the catalyst and resulting devices are compared. High forest density CNTs are shown to acoustically decouple the SMRs from the water and in-liquid TLM Q values higher than 150 are recorded even exceeding TSM SMRs without CNTs. The TLM Q in water is remarkably improved from 3 to 160 for the first time by dense CNT forests, rendering the large-scale fabrication of TLM SMRs for liquid-phase sensing applications possible. Despite this partial isolation, SMRs with CNT forests ∼15 μm tall can still detect binding of bovine serum albumin. [ABSTRACT FROM AUTHOR]

The first steps in the development of an aptasensor for bacterial meningitis diagnosis in real time are described: slow off-rate modified aptamers (SOMAmer) selection, gravimetric sensor fabrication and functionalization of its active surface. SOMAmers polyclonal populations were generated to surface specific proteins PavA ( S. pneumoniae ) and FHbp ( N. meningitidis ) by systematic evolution of ligands by exponential enrichment method (SELEX). After eight rounds, they were tested by direct enzyme-linked oligonucleotide assays (ELONA) and by high frequency (1.4 GHz) gravimetric sensors based on thin film AlN resonators operating in shear mode. The sensing surface of the resonators was functionalized using a silane-glutaraldehyde based protocol and the binding of PavA and FHbp was measured in real time. The SOMAmers polyclonal populations showing the best ELONA results have been also tested using gravimetric sensors and the binding to the protein functionalized surface was measured in real time showing positive results. These first steps towards the development of an aptasensor for the targeted bacteria demonstrate the potential of the method for sensitive, rapid, and cost effective detection of bacterial meningitis. [ABSTRACT FROM AUTHOR]

Thin film acoustic wave resonator based devices require compensation of temperature coefficient of frequency (TCF) in many applications. This work presents the design and fabrication of temperature compensated solidly mounted resonators (SMRs). The characteristics of each material of the layered structure have an effect on the device TCF but depending on the relative position with respect to the piezoelectric material in the stack. The influence of material properties of the different layers composing the device on the TCF is discussed in detail. TCF behavior simulation is done with Mason’s model and, to take into account the deterioration of overall performance due to the finite lateral size and shape of the resonator, we have used 2D and 3D finite element modelling of the resonators. The overall behavior of the device for external loads is predicted. SMRs are designed according to simulations and fabricated with different configurations to obtain TCF as near to zero as possible with an optimized response. Resonators are made by depositing Mo/AlN/Mo piezoelectric stacks on acoustic reflectors. As reflector materials, conductive W and insulating WO x films have been used as high acoustic impedance materials. SiO 2 films are used as low acoustic impedance material. [ABSTRACT FROM AUTHOR]

We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ~430, and at resonance of ~100. The effective coupling coefficient is of ~6%, and the resonant frequencies are up to ~800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism. [ABSTRACT FROM AUTHOR]

Growing carbon nanotube (CNT) forests on metals for integrated circuits interconnections or active layers applications is currently a challenge. CNT forests easily develop on insulators but their growth on metallic substrates is subject to interdiffusion and wettability effects that hamper the formation of the catalyst nanoparticles. This paper reports the successful growth of dense CNT forests on some metallic layers (Mo, Ta, W, and Ir) in comparison to other metallic films (Au, Cu, and Ti) over which CNTs are hardly achieved. The CNT forests are grown by thermal decomposition of C 2 H 2 diluted in NH 3 and characterized by Raman spectroscopy and scanning electron microscopy. Stabilizing Al thin films placed between the metallic substrates and the Fe catalyst promote the formation of Fe nanoparticles. Metallic substrates, thickness of the Al stabilizer, and temperature and raise time during nanoparticles formation are all instrumental parameters in the growth and final structure of the CNT forests. [ABSTRACT FROM AUTHOR]