1. Limiting Effects on the Design of Vertical Superjunction Collectors in SiGe HBTs.
- Author
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Wier, Brian R., Raghunathan, Uppili S., Fleetwood, Zachary E., Cressler, John D., Oakley, Michael A., Joseph, Alvin J., and Jain, Vibhor
- Subjects
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BREAKDOWNS (Machinery) , *SILICON , *GERMANIUM , *HETEROJUNCTION bipolar transistors , *MILLIMETER waves - Abstract
The implementation of a "superjunction" collector design in a silicon--germaniumheterojunction bipolar transistor technology is explored for enhancing breakdown performance. The superjunction collector is formed via the placement of a series of alternating the p/xn-doped layers in the collector-base space charge region and is used to reduce avalanche generation leading to breakdown. An overview of the physics underlying superjunction collector operation is presented, together with TCAD simulations, and a parameterization methodology is developed to explore the limits of the superjunction collector performance. Measured data demonstrate the limitations explored in simulation. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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