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Dimensional surface metrology is required to enable advanced manufacturing process control for products such as large-area electronics, microfluidic structures, and light management films, where performance is determined by micrometre-scale geometry or roughness formed over metre-scale substrates. While able to perform 100% inspection at a low cost, commonly used 2D machine vision systems are insufficient to assess all of the functionally relevant critical dimensions in such 3D products on their own. While current high-resolution 3D metrology systems are able to assess these critical dimensions, they have a relatively small field of view and are thus much too slow to keep up with full production speeds. A hybrid 2D/3D inspection concept is demonstrated, combining a small field of view, high-performance 3D topography-measuring instrument with a large field of view, high-throughput 2D machine vision system. In this concept, the location of critical dimensions and defects are first registered using the 2D system, then smart routing algorithms and high dynamic range (HDR) measurement strategies are used to efficiently acquire local topography using the 3D sensor. A motion control platform with a traceable position referencing system is used to recreate various sheet-to-sheet and roll-to-roll inline metrology scenarios. We present the artefacts and procedures used to calibrate this hybrid sensor system for traceable dimensional measurement, as well as exemplar measurement of optically challenging industrial test structures. [ABSTRACT FROM AUTHOR]

Existing volumetric modulated arc therapy (VMAT) optimization using coplanar arcs is highly efficient but usually dosimetrically inferior to intensity modulated radiation therapy (IMRT) with optimized non-coplanar beams. To achieve both dosimetric quality and delivery efficiency, we proposed in this study, a novel integrated optimization method for non-coplanar VMAT (4πVMAT). 4πVMAT with direct aperture optimization (DAO) was achieved by utilizing a least square dose fidelity objective, along with an anisotropic total variation term for regularizing the fluence smoothness, a single segment term for imposing simple apertures, and a group sparsity term for selecting beam angles. Continuous gantry/couch angle trajectories were selected using the Dijkstra's algorithm, where the edge and node costs were determined based on the maximal gantry rotation speed and the estimated fluence map at the current iteration, respectively. The couch–gantry–patient collision space was calculated based on actual machine geometry and a human subject 3D surface. Beams leading to collision are excluded from the DAO and beam trajectory selection (BTS). An alternating optimization strategy was implemented to solve the integrated DAO and BTS problem. The feasibility of 4πVMAT using one full-arc or two full-arcs was tested on nine patients with brain, lung, or prostate cancer. The plan was compared against a coplanar VMAT (2πVMAT) plan using one additional arc and collimator rotation. Compared to 2πVMAT, 4πVMAT reduced the average maximum and mean organs-at-risk dose by 9.63% and 3.08% of the prescription dose with the same target coverage. R50 was reduced by 23.0%. Maximum doses to the dose limiting organs, such as the brainstem, the major vessels, and the proximal bronchus, were reduced by 8.1 Gy (64.8%), 16.3 Gy (41.5%), and 19.83 Gy (55.5%), respectively. The novel 4πVMAT approach affords efficient delivery of non-coplanar arc trajectories that lead to dosimetric improvements compared with coplanar VMAT using more arcs. [ABSTRACT FROM AUTHOR]