1. Sputtered ITO/Ag/ITO Films: Growth Windows and Ag/ITO Interfacial Properties.
- Author
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Lei, Pei, Chen, Xiaoting, Yan, Yue, Zhang, Xuan, Hao, Changshan, Peng, Jingjing, Ji, Jianchao, and Zhong, Yanli
- Subjects
THIN films ,X-ray photoelectron spectroscopy ,OPTICAL films ,INDIUM tin oxide ,ELECTRICAL resistivity - Abstract
Oxide-metal-oxide (OMO) multilayer film has attracted increasing interest due to its high performance, including the high optical transparency and low electric resistivity, and has been considered a promising substitute for the conventional indium tin oxide (ITO) film. In this work, we studied the role of growth parameters for the performance of sputtered ITO/Ag/ITO multilayer film. ITO/Ag/ITO film with superior properties of transmittance of 89.1% and sheet resistance of 8 Ω/□ was prepared. The effects of deviation of film thickness on the optical and properties were investigated systematically. Ultrathin ITO
1−x film with thickness of less than 5 nm covers the active Ag surface to avoid Ag oxidation effectively, resulting in both high transmittance and conductivity. The X-ray photoelectron spectroscopy depth profile analysis indicates the role of ultrathin ITO1−x film on Ag surface oxidation. This work provides a guideline to fabricate high-quality OMO-based films and devices. [ABSTRACT FROM AUTHOR]- Published
- 2022
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