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This paper describes the design and performance of two new high-resolution interline charge-coupled device image sensors for use in industrial, machine vision, and aerial photography applications. These sensors feature 4.5- $\mu \text{m}$ pixels, 4 outputs, fast dump gate, horizontal lateral overflow drain, and vertical electronic shutter. The 43-Mp sensor has a 35-mm optical format and the 50-Mp sensor has a larger format with a 2.175:1 aspect ratio that matches many modern mobile phone displays. This paper discusses the challenges and solutions to manufacture such large sensors with superior image quality such as uniformity, read noise, dark current, smear, transfer gate blooming, lag, and so on. [ABSTRACT FROM AUTHOR]

This paper describes recent process modifications made to enhance the performance of interline and electron-multiplying charge-coupled-device (EMCCD) image sensors. By use of MeV ion implantation, quantum efficiency in the NIR region of the spectrum was increased by 2×, and image smear was reduced by 6 dB. By reducing the depth of the shallow photodiode (PD) implants, the photodiode-to-vertical-charge-coupled-device (VCCD) transfer gate voltage required for no-lag operation was reduced by 3 V, and the electronic shutter voltage was reduced by 9 V. The thinner, surface pinning layer also resulted in a reduction of smear by 4 dB in the blue portion of the visible spectrum. For EMCCDs, gain aging was eliminated by providing an oxide-only dielectric under its multiplication phase, while retaining the oxide-nitride-oxide (ONO) gate dielectrics elsewhere in the device. [ABSTRACT FROM AUTHOR]

Two interline, 30 frames/second, high-resolution image sensors are described that use two-phase charge coupled device (CCD) technology. One is a two-megapixel, interlaced high-definition television sensor, and the other is a 1-megapixel, progressives-can sensor for machine vision applications. These sensors include features such as dual-horizontal CCD readout, antibiooming protection, electronic shutter capability, low smear, and no lag. [ABSTRACT FROM AUTHOR]