1. Polarity of homoepitaxial ZnO films grown by Nd:YAG pulsed laser deposition.
- Author
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Masuda, Tatsuya, Sato, Toshihiro, Lippmaa, Mikk, Dazai, Takuro, Sekine, Norihiko, Hosako, Iwao, Koinuma, Hideomi, and Takahashi, Ryota
- Subjects
ZINC oxide films ,PULSED laser deposition ,ND-YAG lasers ,ION scattering ,SUBSTRATES (Materials science) ,YTTRIUM aluminum garnet - Abstract
We investigate the stability of the polar surface of ZnO films grown homoepitaxially on atomically flat ZnO (000 1 ¯) O-face substrates by neodymium yttrium aluminum garnet (Nd:YAG) pulsed laser deposition (PLD). For films grown in the temperature range from 500 to 700 °C, ion scattering spectroscopy showed that the film surface termination was the same as the ZnO substrate. Even for a Mg
0.2 Zn0.8 O/ZnO superlattice, no polarity reversal occurred, indicating that the ZnO (000 1 ¯) O-face is highly stable, despite the film surface sputtering caused by the high kinetic energy of the PLD plume generated by the Nd:YAG laser. [ABSTRACT FROM AUTHOR]- Published
- 2024
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