1. Branched Hydrosilane Oligomers as Ideal Precursors for Liquid-Based Silicon-Film Deposition.
- Author
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Haas, Michael, Christopoulos, Viktor, Radebner, Judith, Holthausen, Michael, Lainer, Thomas, Schuh, Lukas, Fitzek, Harald, Kothleitner, Gerald, Torvisco, Ana, Fischer, Roland, Wunnicke, Odo, and Stueger, Harald
- Subjects
OLIGOMERS ,SILANE ,CHEMICAL precursors ,SILICON films ,NUCLEAR magnetic resonance spectroscopy - Abstract
Herein a convenient synthetic method to obtain 2,2,3,3-tetrasilyltetrasilane 3 and 2,2,3,3,4,4-hexasilylpentasilane 4 on a multigram scale is presented. Proton-coupled
29 Si NMR spectroscopy and single-crystal X-ray crystallography enabled unequivocal structural assignment. Owing to their unique properties, which are reflected in their nonpyrophoric character on contact with air and their enhanced light absorption above 250 nm, 3 and 4 are valuable precursors for liquid-phase deposition (LPD) and the processing of thin silicon films. Amorphous silicon (a-Si:H) films of excellent quality were deposited starting from 3 and characterized by conductivity measurements, ellipsometry, optical microscopy, and Raman spectroscopy. [ABSTRACT FROM AUTHOR]- Published
- 2017
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