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1. Selective growth of Co islands on ion beam induced nucleation centers in a native Si[O.sub.2] film

Author

Cechal, Jan, Tomanec, Ondrej, Skoda, David, Konakova, Katerina, Hrncir, Tomas, Mach, Jindrich, Kolibal, Miroslav, and Sikola, Tomas

Subjects
Cobalt alloys -- Electric properties, Cobalt alloys -- Structure, Ion bombardment -- Usage, Silica -- Electric properties, Silica -- Structure, Physics
Abstract

A simple straightforward method for fabrication of patterns of metallic nanostructures and the application of focused ion beam (FIB) lithography to locally modify a native Si[O.sub.2] layer on a silicon substrate are described. The results proposed that the island formation at patterned sites are due to reduced surface diffusion of Co atoms in the vicinity of FIB modified areas and the lowered kinetic diffusion limits improved the island morphology.

Published
2009

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