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1. A microdeposition technique for carbon nanotubes based on electron beam lithography

Author

Ahlskog, M., Seynaeve, E., Vullers, R.J.M., and Haesendronck, C. Van

Subjects
Electrophoretic deposition -- Methods, Lithography, Electron beam -- Usage, Nanotechnology -- Research, Carbon -- Research, Physics
Abstract

A microdeposition technique for carbon nanotubes based on electron beam lithography was presented. Carbon nanotubes were taken from the solution phase and deposited onto a substrate through openings that vary in size which are lithographically determined in an electron beam resist layer. The technique was used in depositing individual nanotubes on top of gold electrodes using alignment markers.

Published
1999

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