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1. Nanostructural and mechanical properties of nanocomposite nc-TiC/a-C:H films deposited by reactive unbalanced magnetron sputtering

Author

Zehnder, T., Schwaller, P., Munnik, F., Mikhailov, S., and Patscheider, J.

Subjects
Sputtering (Physics) -- Analysis, Magnetrons -- Analysis, Thin films -- Research, Thin films -- Properties, Dielectric films -- Research, Dielectric films -- Properties, Physics
Abstract

Nanostructural and mechanical properties of nanocomposite nc-TiC/a-C:H films that are deposited using reactive unbalanced magnetron sputtering is investigated. The selection of the substrate bias is important and plays a critical role in the nanostructure of nc-TiC/a-C:H nanocomposite.

Published
2004

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