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Fundamental understanding of factors and mechanisms controlling the residual stress formation in material coatings is critical for selection of optimum synthesis and deposition parameters. This article contains data from the investigation of the residual stress properties of Inconel 625 coating measured at different coating thicknesses, 250 µm,300 µm, 350 µm and 400 µm, deposited on 304 stainless steel (SS) substrate using high-velocity oxy-fuel (HVOF) spraying technique. The neutron diffraction technique was employed to measure the residual stresses of the coated specimen. Data provided provides insights into the influence of coating thickness on the residual stress of the material and therefore on the overall mechanical performance and applicability of the component., (© 2024 Published by Elsevier Inc.)