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Ultrathin and low-loss phase-change materials (PCMs) are highly valued for their fast and effective phase transitions and applications in reconfigurable photonic chips, metasurfaces, optical modulators, sensors, photonic memories, and neuromorphic computing. However, conventional PCMs mostly suffer from high intrinsic losses in the near-infrared (NIR) region, limiting their potential for high quality factor ( Q -factor) resonant metasurfaces. Here we present the design and fabrication of tunable bound states in the continuum (BIC) metasurfaces using the ultra-low-loss PCM Sb 2 Se 3 . Our BIC metasurfaces, only 25 nm thick, achieve high modulation depth and broad resonance tuning in the NIR with high Q -factors up to 130. Experimentally, we employ these BIC metasurfaces to modulate photoluminescence in rare earth-doped upconversion nanoparticles, reducing the excitation power for multiphoton photoluminescence and enabling emission polarization manipulation. This work offers a promising platform for developing active resonant metasurfaces, with broad applications including optical modulation, ultrafast switches, color filtering, and optical sensing.

The control of a lens's numerical aperture has potential applications in areas such as photography and imaging, displays, sensing, laser processing and even laser-implosion fusion. In such fields, the ability to control lens properties dynamically is of much interest, and active meta-lenses of various kinds are under investigation due to their modulation speed and compactness. However, as of yet, meta-lenses that explicitly offer dynamic control of a lens's numerical aperture have received little attention. Here, we design and simulate active meta-lenses (specifically, focusing meta-mirrors) using chalcogenide phase-change materials to provide such control. We show that, operating at a wavelength of 3000 nm, our devices can change the numerical aperture by up to a factor of 1.85 and operate at optical intensities of the order of 1.2 × 10 9 Wm -2 . Furthermore, we show the scalability of our design towards shorter wavelengths (visible spectrum), where we demonstrate a change in NA by a factor of 1.92.

Materials of which the refractive indices can be thermally tuned or switched, such as in chalcogenide phase-change alloys, offer a promising path towards the development of active optical metasurfaces for the control of the amplitude, phase, and polarization of light. However, for phase-change metasurfaces to be able to provide viable technology for active light control, in situ electrical switching via resistive heaters integral to or embedded in the metasurface itself is highly desirable. In this context, good electrical conductors (metals) with high melting points (i.e., significantly above the melting point of commonly used phase-change alloys) are required. In addition, such metals should ideally have low plasmonic losses, so as to not degrade metasurface optical performance. This essentially limits the choice to a few noble metals, namely, gold and silver, but these tend to diffuse quite readily into phase-change materials (particularly the archetypal Ge 2 Sb 2 Te 5 alloy used here), and into dielectric resonators such as Si or Ge. In this work, we introduce a novel hybrid dielectric/plasmonic metasurface architecture, where we incorporated a thin Ge 2 Sb 2 Te 5 layer into the body of a cubic silicon nanoresonator lying on metallic planes that simultaneously acted as high-efficiency reflectors and resistive heaters. Through systematic studies based on changing the configuration of the bottom metal plane between high-melting-point diffusive and low-melting-point nondiffusive metals (Au and Al, respectively), we explicitly show how thermally activated diffusion can catastrophically and irreversibly degrade the optical performance of chalcogenide phase-change metasurface devices, and how such degradation can be successfully overcome at the design stage via the incorporation of ultrathin Si 3 N 4 barrier layers between the gold plane and the hybrid Si/Ge 2 Sb 2 Te 5 resonators. Our work clarifies the importance of diffusion of noble metals in thermally tunable metasurfaces and how to overcome it, thus helping phase-change-based metasurface technology move a step closer towards the realization of real-world applications.