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Phase change materials exhibit unique advantages in reconfigurable photonic devices due to drastic tunability of photoelectric properties. Here, we systematically investigate the thermal equilibrium process and the ultrafast dynamics of Ge

The implementation of Terahertz (THz) modulation is critical for applications in high-speed wireless communications, security screening and so on. Therefore, it is particularly significant to obtain THz wave modulation devices with stable and flexible performance, easy manipulation of the modulation method, and multi-functionality. Here, we propose a flexible all-dielectric metamaterial by embedding zirconia (ZrO2) microspheres into a vanadium dioxide/polydimethylsiloxane (VO2/PDMS) composite, which can achieve thermal and mechanical tuning of THz wave transmission. When the temperature of the ZrO2/VO2/PDMS metamaterial increases, VO2 changes from the insulating phase to the metallic phase, and the 1st (at 0.304 THz) and 2nd (at 0.414 THz) order magnetic resonances exhibit the tunability of 20 GHz and 15 GHz, respectively. When stretched, the 1st and 2nd order magnetic resonances show the tunability of 12 GHz and 10 GHz, respectively. In the meantime, there are accompanying changes in transmittance at the resonances. The ZrO2/VO2/PDMS all-dielectric metamaterial presented in this work provides an alternative strategy for developing actively tunable, flexible, and versatile THz devices. In addition, it has the merits of simple preparation and low cost, promising large-area and rapid preparation of meta-arrays.

The combination of VO2 and metasurfaces has opened an attractive route to dynamically control terahertz (THz) waves based on the giant conductivity change. However, the high-precision control of microfabrication and single performance of conductivity change limit the multifunctional application of VO2-based metasurfaces. Here, we proposed a VO2-metallic hybrid metasurface by in situ depositing high-quality VO2 thin films onto a metasurface composed of asymmetric Fano resonance units. It exhibits agile frequency and amplitude modulation for THz transmission across tuning the dielectric constant and conductivity of VO2. The metallic metasurface is designed as a matrix to achieve high transmission at 0.61 and 0.78 THz due to the split-ring resonance. During the thermally triggered phase transition of VO2, we found that the resonance frequency and amplitude can be tuned dominantly by the change of dielectric constant and conductivity, respectively. In particular, the increased dielectric constant enables red shift of the frequency by around 0.48 THz and the conductivity increases lead to a giant THz amplitude modulation of 88%. These results provide a route for developing VO2-based THz smart devices combined with functional metasurfaces and hold great promise for applications in THz sensor and modulation.