1. Cyclic BCl3-based plasma treatments for enhancing surface quality of (010) β-Ga2O3 substrates
- Author
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Douest, Y., Mannequin, C., Ito, T., Ozaki, Y., Vallee, C., Gheeraert, E., Akimoto, K., Sasaki, M., Teramoto, T., Dussarat, C., Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Graduate School of Environmental Studies [Nagoya], Nagoya University, Semi-conducteurs à large bande interdite (SC2G ), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Clot, Marielle, and Semi-conducteurs à large bande interdite (NEEL - SC2G)
- Subjects
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,ComputingMilieux_MISCELLANEOUS - Abstract
International audience
- Published
- 2019