1. Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping
- Author
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Takafumi Yamaguchi, Naoto Usami, Kei Misumi, Atsushi Toyokura, Akio Higo, Shimpei Ono, Gilgueng Hwang, Guilhem Larrieu, Yoshiho Ikeuchi, Agnes Tixier-Mita, Ken Saito, Timothee Levi, Yoshio Mita, Graduate School of Engineering [The Univ of Tokyo] (UTokyo), The University of Tokyo (UTokyo), Central Research Institute of Electric Power Industry, Laboratory for Integrated Micro Mechatronics Systems (LIMMS), The University of Tokyo (UTokyo)-Centre National de la Recherche Scientifique (CNRS), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Nihon University, and University of Bordeaux, IMS, CNRS 5218
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[SPI]Engineering Sciences [physics] ,Mechanical Engineering ,Electrical and Electronic Engineering - Abstract
International audience; We present a self-deformable flexible tweezer capable of simultaneous mechanical handling and electrical measurements. The tweezer has a soft cantilever with the dimensions 2 mm ×8 mm × 75- 100 μm , and undergoes self-deformation. The device is shown to be successfully capable of detecting electrical signals by gently touching the surface and grasping a spherical bead. The device demonstrated the lowest working voltage (1.5 VDC), force suitable for soft gripping, and curvature radius of 2 mm, that was one of the smallest values compared to that of similar state-of-the-art devices. The device was fabricated using a unique and highly reliable process that was specifically developed to produce flexible cantilevers with novel ionic polymer-metal composites (IPMCs). The materials used were poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) and an ionic liquid (IL). The PVDF-TrFE/IL gel was prepared using acetone as the solvent and the gel was coated with silver nanowires as the electrodes. The actuator with a length of 8 mm and containing 50 wt% IL yielded the largest bending displacement of 7 mm and minimum curvature radius of 2 mm at 1.5 VDC. [2022-0026]
- Published
- 2022
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