1. A novel design of multi-light LAPS based on digital compensation of frequency domain
- Author
-
Zhang Qintao, Gaoyan Zhang, Wang Ping, Wolfgang J. Parak, and M. George
- Subjects
Photocurrent ,Materials science ,business.industry ,Metals and Alloys ,Light-addressable potentiometric sensor ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Optics ,Pointer (computer programming) ,Frequency domain ,Materials Chemistry ,Potentiometric sensor ,Wafer ,Electrical and Electronic Engineering ,business ,Instrumentation ,Image resolution - Abstract
In this report, a method which can significantly increase the measurement rate of the light-addressable potentiometric sensor (LAPS) is suggested. By illuminating the LAPS simultaneously at several positions, of which each is illuminated with a light pointer modulated with a different frequency, the surface potential at all illuminated regions can be measured simultaneously by analyzing the resulting photocurrent. By using this method, the rate to obtain a complete image of the surface potential distribution across a LAPS wafer can be drastically increased compared to the conventional mode, in which images are obtained by scanning the surface with one single light pointer. The technical feasibility of such a device is discussed and test measurements are presented.
- Published
- 2001