1. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor
- Author
-
张忠玉 Zhang Zhong-yu, 张金平 Zhang Jinping, 郑立功 Zheng Li-gong, and 张学军 Zhang Xue-jun
- Subjects
Surface (mathematics) ,business.industry ,Wavefront sensor ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Interferometry ,Optics ,Reflection (physics) ,Astronomical interferometer ,Profilometer ,Hyperboloid ,business ,Shack–Hartmann wavefront sensor ,Mathematics - Abstract
As the surface shape of a reflection mirror is different from the target shape at the end stage of the grinding process,and the profilometers and common interferometers can not measure the surface error exactly,this paper proposed a method to measure the large aperture aspheric surface by using a Shack-Hartmann Wavefront Sensor(SHWS) with a large dynamic range and high precision.The principle of the measuring system for SHWS was researched,its measuring errors were analyzed and a corresponding data processing software was compiled.Using a simulation reference file,a hyperboloid reflection mirror with a diameter of 350 mm was tested by the SHWS.Results indicate that the PV and RMS of the surface error are 0.388λ and 0.043λ,respectively(λ=632.8 nm).In order to testify the measurement result,the mirror is also measured by an interferometer with a null compensator.Comparing the two testing results,the PV and RMS of the deviation are 0.014λ and 0.001λ,respectively,which proves the feasibility of measuring large aperture aspheric surfaces by SHWSs.
- Published
- 2012