1. Atomic Emission Spectra Diagnosis and Electron Density Measurement of Semiconductor Bridge (SCB) Plasma
- Author
-
Shen Rui-Qi, Li Yan, Zhu Shun-Guan, Wan Xiaoxia, Feng Hong-Yan, and Zhang Lin
- Subjects
Electron density ,Range (particle radiation) ,Semiconductor ,Thermodynamic equilibrium ,Chemistry ,business.industry ,Atomic emission spectroscopy ,Plasma ,Saha ionization equation ,Emission spectrum ,Atomic physics ,Condensed Matter Physics ,business - Abstract
Emission spectra of a semiconductor bridge (SCB) plasma in a visible range was studied in air. The electron density was measured in a conventional way from the broadening of the A1 I 394.4 nm Stark width. Based on the Saha equation, a system for recording the intensity of Si I 390.5 nm and Si II 413.1 nm was designed. With this technique, the SCB plasma electron density was measured well and accurately. Moreover, the electron density distribution Vs time was acquired from one SCB discharge. The individual result from the broadening of the Al I 394.4 nm Stark width and Saha equation was all in the range of 1015 cm−3 to 1016 cm−3. Finally the presumption of the local thermodynamic equilibrium (LTE) condition was validated.
- Published
- 2010