1. Embedded charge for microswitch applications
- Author
-
Kiljan, Joanna
- Subjects
- Electric charge and distribution, Electric switchgear, Microelectronics, Electrets, Microelectromechanical systems
- Abstract
In this work a micro-electro-mechanical system (MEMS) is proposed for radio frequency (RF) switching applications. MEMS devices outperform the traditionally used solid-state devices in areas such as isolation, insertion loss, and linearity. However, micro switches suffer from high actuation voltage, lifetime limitations, and high packaging cost. A novel micro switch design that incorporates embedded charge in a cantilever structure can, in principle, enable low-voltage operation. This was the primary motivation for this study
- Published
- 2004