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MEMS devices are finding application in diverse fields that include energy harvesting, microelectronics and sensors. In energy harvesting, MEMS scale devices are employed due to its efficiencies of scale. The miniaturization of energy harvesters permit them to be integrated as the power supply for sensors often in the same package and also extends their use to remote and extreme ambient applications. Unlike inductive harvesting, piezoelectric and magnetoelectric devices lend easily to MEMS scaling. The processing of such Piezo-MEMS devices often requires special fabrication, characterization and testing techniques. Our research work has focused on the development of the various technologies for a) the better characterization of the constituent materials that make up these devices, b) the conceptualization and structural design of unique MEMS energy harvesters and finally c) the development of the unit operations (many novel) for fabrication and the mechanical and electrical testing of these devices. In this research work, we have pioneered some new approaches to the characterization of thin films utilized in Piezo-MEMS devices: (1) Temperature-Time Transformation (TTT) diagrams are used to document texture evolution during thermal treatment of ceramics. Multinomial and multivariate regression techniques were utilized to create the predictor models for TTT data of Pb(Zr0.60Ti0.40 O3) sol-gel thin films. (2) We correlated the composition (measured using Energy Dispersive X-ray analysis (EDX) and Electron Probe Micro Analysis (EPMA)) of Pb(Zr0.52Ti0.48 O3) RF sputtered thin films to its optical dispersion properties measured using Variable Angle Spectroscopic Ellipsometry (VASE). Wemple-DiDomenico, Jackson-Amer, Tauc and Urbach optical dispersion factors and Lorentz Lorenz polarizability relationships were combined to realize a model for predicting the elemental content of any thin film system. (3) We developed in house capability for strain analysis of magnetostrictive thin films using laser Doppler Vibrometry (LDV). We determined a methodology to convert the displacements measurements of AC magnetic field induced vibrations of thin film samples into magnetostriction values. (4) Finally, we report the novel use of a thermo-optic technique, Time Domain Thermoreflectance (TDTR) in the study of Pb(Zr,Ti)O3 (PZT) thin film texturing. Time Domain Thermoreflectance (TDTR) has been proved to be capable of measuring thermal properties of atomic layers and interfaces. Therefore, we utilized TDTR to analyze and model the heat transport at the nano scale and correlate with different PZT crystalline orientations. To harvest energy at the low frequency (

In most man-made flight, vehicle control is achieved by deflecting flaps. However, in nature, morphing surfaces are found on both flying and swimming creatures. Morphing is used in nature because it is a more efficient form of control. This thesis investigates using morphing flaps to control a class of UAVs known as ducted fan vehicles. Specifically, this thesis discusses both the challenges and benefits of using morphing control surfaces. To achieve morphing, a piezoelectric device known as Macro Fiber Composites is used. These devices are embedded in the skin of the vehicles control surface, and when actuated, they cause the control surface to increase or decrease camber. This thesis describes experiments that were performed to investigate the performance of this type of actuator. Specifically, the actuation bandwidth of these devices is presented and compared to a servo. Results show that the morphing control surfaces can actuate at frequencies twice as high as a servo.

The application of smart materials to control the flight dynamics of a Micro Air Vehicle (MAV) has numerous benefits over traditional servomechanisms. Under study is wing morphing achieved through the use of piezoelectric Macro Fiber Composites (MFCs). These devices exhibit low power draw but excellent bandwidth characteristics. This thesis provides a background in the 2D analytical and computer modeling tools and methods needed to design and characterize an MFC-actuated airfoil. A composite airfoil is designed with embedded MFCs in a bimorph configuration. The deflection capabilities under actuation are predicted with the commercial finite element package NX Nastran. Placement of the piezoelectric actuator is studied for optimal effectiveness. A thermal analogy is used to represent piezoelectric strain. Lift and drag coefficients in low Reynolds number flow are explored with XFOIL. Predictions are made on static aeroelastic effects. The thin, cambered Generic Micro Aerial Vehicle (GenMAV) airfoil is fabricated with a bimorph actuator. Experimental data are taken with and without aerodynamic loading to validate the computer model. This is accomplished with in-house 2D wind tunnel testing.

Structural health monitoring (SHM) is the process of using measurements of a structure's response to known excitations and trying to determine if damage has occurred to the structure. This also fits the description of non-destructive evaluation (NDE). The main difference is that NDE takes place while the structure is out of service and SHM is intended to take place while the structure is in service. As such, SHM provides the opportunity to provide early warning against structural failure. This thesis intends to advance the state of the art in SHM by examining two approaches to SHM: vibration based and impedance based, and to associate these with the NDE method of stress intensity factors. By examining these methods the goal is to try and answer some of the important questions in SHM process. The first is to experimentally validate a crack model and to see how small of a crack can be detected by vibration methods. The second is to use the concept of stress intensity factor to perform an SHM type of measurement to determine the remaining life of a structure once the impedance method has determined that damage has occurred. The measurement system considered consists of using several different piezoceramic materials as self-sensing actuators and sensors. The structures are a simple beam and a more complex lug element used in aircraft applications. The approach suggested here is to use the impedance and vibration methods to detect crack initiation and then to use the proposed stress intensity method to measure the stress intensity factor of the structure under consideration.

The design and implementation of a morphing unmanned aircraft using smart materials is presented. Articulated lifting surfaces and articulated wing sections actuated by servos are difficult to instrument and fabricate in a repeatable fashion on thin, composite-wing micro-air-vehicles. Assembly is complex and time consuming. A type of piezoceramic composite actuator commonly known as Macro Fiber Composite (MFC) is used for wing morphing. The actuation capability of this actuator on fiberglass unimorph was modeled by the Rayleigh-Ritz method and quantified by experimentation. Wind tunnel tests were performed to compare conventional trailing edge control surface effectiveness to an MFC actuated wing section. The continuous surface of the MFC actuated composite airfoil produced lower drag and wider actuation bandwidth. The MFC actuators were implemented on a 0.76 m wingspan aircraft. The remotely piloted experimental vehicle was flown using two MFC patches in an elevator/aileron (elevon) configuration. Preliminary testing has proven the stability and control of the design. Flight tests were performed to quantify roll control using the actuators. Force and moment coefficients were measured in a low-speed, open section wind tunnel, and the database of aerodynamic derivatives were used to analyze control response.

Guided-wave (GW) approaches have shown potential in various initial laboratory demonstrations as a solution to structural health monitoring (SHM) for damage prognosis. This thesis starts with an introduction to and a detailed survey of this field. Some critical areas where further research was required and those that were chosen to be addressed herein are highlighted. Those were modeling, design guidelines, signal processing and effects of elevated temperature. Three-dimensional elasticity-based models for GW excitation and sensing by finite dimensional surface-bonded piezoelectric wafer transducers and anisotropic piezocomposites are developed for various configurations in isotropic structures. The validity of these models is extensively examined in numerical simulations and experiments. These models and other ideas are then exploited to furnish a set of design guidelines for the excitation signal and transducers in GW SHM systems. A novel signal processing algorithm based on chirplet matching pursuits and mode identification for pulse-echo GW SHM is proposed. The potential of the algorithm to automatically resolve and identify overlapping, multimodal reflections is discussed and explored with numerical simulations and experiments. Next, the effects of elevated temperature as expected in internal spacecraft structures on GW transduction and propagation are explored based on data from the literature incorporated into the developed models. Results from the model are compared with experiments. The feasibility of damage characterization at elevated temperatures is also investigated. An extension of the modeling effort for GW excitation by finite-dimensional piezoelectric wafer transducers to composite plates is also proposed and verified by numerical simulations. At the end, future directions for research to make this technology more easily deployable in field applications are suggested.

The use of piezoelectric ceramic materials for structural actuation is a fairly well developed practice that has found use in a wide variety of applications. However, actuators with piezoceramic fibers and interdigitated electrodes have risen to the forefront of the intelligent structures community due to their increased actuation capability. However, their fiber-reinforced construction causes them to exhibit anisotropic piezomechanical properties, and the required larger driving voltages make the inherent piezoelectric nonlinearities more prevalent. In order to effectively utilize their increased performance, the more complicated behavior of these actuators must be sufficiently characterized. The current work is intended to provide a detailed nonlinear characterization of the mechanical and piezoelectric behavior of the Macro Fiber Composite actuator, which was developed at the NASA Langley Research Center. The mechanical behavior of this planar actuation device, which is both flexible and robust, is investigated by first developing a classical lamination model to predict its short-circuit linear-elastic properties, which are then verified experimentally. The sensitivity of this model to variations in constituent material properties is also studied. Phenomenological models are then used to represent the measured nonlinear short-circuit stress-strain response to various in-plane mechanical loads. Piezoelectric characterization begins with a nonlinear actuation model whose material parameters are determined experimentally for monotonically increasing electric fields. Next, the response of the actuator to a sinusoidal electric field input is measured under various constant mechanical loads and field amplitudes. From this procedure, the common linear piezoelectric strain coefficients are presented as a function of electric field amplitude and applied stress. In addition, a Preisach model is developed that uses the collected data sets to predict the hysteretic piezoelectric behavior of the MFC. Lastly, other related topics, such as manufacturing, cure kinetics modeling and linear thermoelasticity of the Macro Fiber Composite, are covered in the appendices.