8 results on '"Dopant Activation"'
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2. A look into donor–acceptor compensation in ZnO thin films driven by dopant valence
3. Microwave annealing, a low-thermal-budget process for dopant activation in phosphorus-implanted MOSFET devices
4. Modeling of laser annealing
5. Advances in pulsed-laser-deposited AIN thin films for high-temperature capping, device passivation, and piezoelectric-based RF MEMS/NEMS resonator applications
6. A detailed model for defect concentration and dopant activation in GaAs
7. Strain conservation in implantation-doped GeSi layers on Si(100)
8. Strain evolution and dopant activation in P-lmplanted metastable pseudomorphic Si(100)/Ge0.12Si0.88
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