9 results on '"deep reactive ion etching"'
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2. Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes
3. Multilayer Etched Antireflective Structures for Silicon Vacuum Windows
4. Deep reactive ion etching of silicon using non-ICP-based equipment
5. Fabrication and Characterization of Silicon (100) Membranes for a Multi-beam Superconducting Heterodyne Receiver
6. Piezoelectric performance of continuous beam and narrow supported beam arrays for artificial basilar membranes
7. Formation of silicon nanostructures with a combination of spacer technology and deep reactive ion etching
8. An X band RF MEMS switch based on silicon-on-glass architecture
9. Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication
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