1. Versatile probes for scanning probe microscopy.
- Author
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Kramer, Bernhard, Oesterschulze, E., Bodenstein, W., Büchel, D., Ewert, K., Heisig, S., Kurzenknabe, T., Leinhos, T., Malavé, A., Mihalcea, C., Müller-Wiegand, M., Neber, S., Rudow, O., Scholz, W., Steffens, W., Vollkopf, A., and Kassing, R.
- Abstract
In this paper we focus on some aspects of the development and fabrication of integrated cantilever probes for scanning probe microscopy (SPM). We demonstrate that a variety of materials, e.g. silicon, gallium arsenide, diamond etc., are available as substrate material. Furthermore, several concepts for SPM probes are considered which exploit the unique properties of the above mentioned substrate materials. [ABSTRACT FROM AUTHOR]
- Published
- 1999
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