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We describe a new high-brightness laser-plasma source for X-rays and extreme ultraviolet (EUV) radiation. By utilizing a liquid target the harmful emission of debris is significantly reduced or completely eliminated. The spectrum can be spectrally tailored by choosing a suitable liquid. We also show the possibilities to extend the debris-free source to liquid solutions of solids and to liquefied gases. This results in new emission wavelengths and offers the possibility to increase conversion efficiency. We believe that this new source is a suitable choice for EUV lithography as well as for proximity X-ray lithography.

Blue light was generated at room temperature by quasiphase matched second harmonic generation in planar and channel lithium tantalate (LiTaO3) annealed proton exchange waveguides using the d33 nonlinear coefficient. Alternating ferro-electric domains for third order quasiphase matching were created by poling the substrates with a periodic electric field.