7 results on '"Klaassen E"'
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2. Integrated thermal-conductivity vacuum sensor
3. Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators
4. Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback
5. Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures
6. Diode-based thermal r.m.s. converter with on-chip circuitry fabricated using CMOS technology
7. The generation of bending sequences in a CAPP system for sheet-metal components
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