Search

A cylindrical ultrasonic micromotor has been demonstrated and the operating principle has been confirmed. The stator transducer in this motor was 2.4 mm in diameter, 10 mm long and 0.25 mm thick. One advantage of the ultrasonic micromotor is the possibility of high torque. However, the previous motor was only used to rotate the tiny screw which was used as a rotor. We presents a method of improving the efficiency of this ultrasonic micromotor and the results obtained.

The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is a new method reported by Tsurumi et al.. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.