1. Ultrathin Films of Palladium Oxide for Oxidizing Gases Detecting.
- Author
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Ievlev, V.M., Ryabtsev, S.V., Shaposhnik, A.V., Samoylov, A.M., Kuschev, S.B., and Sinelnikov, A.A.
- Subjects
PALLADIUM oxides ,GAS detectors ,THIN films ,THERMAL oxidation (Materials science) ,POLYCRYSTALS - Abstract
For the first time ultrathin films of palladium oxide are set forth as the perspective materials for detecting oxidizing gases. PdO 1± x thin films were prepared by thermal oxidation of previously formed Pd layers. By RHEED and HRTEM investigations it has been established that homogenous polycrystalline PdO 1± x films (thickness was about 5 – 10 nm) with grain size ∼ 7 – 15 nm were formed on polished poly-Al 2 O 3 , SiO 2 /Si(100), optical quartz, and amorphous C/KCl substrates. At ozone detecting in air PdO 1± x films have shown high values of sensor response, signal stability, and reproducibility of sensor response. At fabrication of gas sensors usage of PdO 1± x ultrathin films has some advantages in comparison with other materials. Firstly, PdO 1± x films have shown high values of sensor response, signal stability, and reproducibility of sensor response. Secondly, the synthesis procedure of binary films PdO 1± x is rather simple and is compatible with planar processes of a microelectronic industry also. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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