19 results on '"Tortai, J.-H."'
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2. On the Fly Ellipsometry Imaging for Process Deviation Detection
3. Non-conductive ferromagnetic carbon-coated (Co, Ni) metal/polystyrene nanocomposites films
4. New Approach to Closely Spaced Disordered Cobalt–Graphene Polymer Nanocomposites for Non-Conductive RF Ferromagnetic Films
5. Core double–shell cobalt/graphene/polystyrene magnetic nanocomposites synthesized by in situ sonochemical polymerization
6. Structural, magnetic and dielectric properties of non conducting nanocomposites for RF applications
7. CMOS compatible strategy based on selective atomic layer deposition of a hard mask for transferring block copolymer lithography patterns
8. Epoxy silsesquioxane resists for UV nanoimprint lithography
9. Ellipsometry studies of the kinetic of deprotection of thin 193 nm positive tone resist film
10. Geometry impact on ultrahigh resolution pattern collapse
11. Surface characterization of imprinted resist above glass transition temperature
12. Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films
13. Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems
14. Overcoming pattern collapse of ultra high resolution dense lines obtained with EUV resists
15. Diagnostic of the self-healing of metallized polypropylene film by modeling of the broadening emission lines of aluminum emitted by plasma discharge
16. Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes
17. Influence of residual solvent in polymers patterned by nanoimprint lithography
18. Influence of pattern density in nanoimprint lithography
19. Self-healing of metallized polymer films of different nature
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