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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

This book presents recent findings on the global existence, the uniqueness and the large-time behavior of global solutions of thermo(vis)coelastic systems and related models arising in physics, mechanics and materials science such as thermoviscoelastic systems, thermoelastic systems of types II and III, as well as Timoshenko-type systems with past history. Part of the book is based on the research conducted by the authors and their collaborators in recent years. The book will benefit interested beginners in the field and experts alike.