Author: "Zai-Fa Zhou" / Journal: 2006 8th international conference on solid-state & integrated circuit technology proceedings - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Zai-Fa Zhou"' showing total 2 results

Start Over Author "Zai-Fa Zhou" Journal 2006 8th international conference on solid-state & integrated circuit technology proceedings

2 results on '"Zai-Fa Zhou"'

1. Plasma Etching Process Simulation for MEMS and IC Fabrication based on a Cellular Automata Method.

Author: Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li, and Chi Zhu
Published: 2006
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2. Three-dimensional simulation of the deep UV light intensity distribution in SU-8 photorsists.

Author: Ming Feng, Qing-An Hang, Wei-Hua Li, Zai-Fa Zhou, and Zhen Zhu
Published: 2006
Full Text: View/download PDF

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