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The spacers placed transversely and lengthwise which are used for supporting 960 times 540 mm FEDs are simulated by ANSYS finite element method. To obtain optimum spacer structures, the stress distribution and the maximum deflection are calculated. By considering the negative effects of spacers, two optimal spacer structures that cause acceptable deflection of the panel are found. Spacers with a length of 162mm, transverse spacing of 25mm and lengthwise spacing of 30mm are used in transversely structure. While spacers are distributed lengthwise with a length of 147mm , lengthwise spacing of 25mm and transverse spacing of 30mm. From the comparison of the areas the spacers occupied in the two spacer structures, the lengthwise structure should be commended to be applied

Porous low-k materials are required for the advanced 45nm node and beyond ULSI interconnect system. The deteriorative mechanical properties of the porous materials must be evaluated accurately. Surface acoustic wave (SAW) technique can measure the Young's modulus of thin films accurately and nondestructively by analyzing the dispersive characters of SAW waves' propagation. In this paper, the theoretical investigation of SAW waves propagating in the transversely isotropic porous low-k film/silicon substrate layered structure is expressed. Several numerical examples are gived. These computation results can be applied to the SAW experiments to determinant the anisotropic Young's modulus of periodic porous low-k film

This paper reports a comprehensive theoretical, finite element analysis of immunosensor for realizing the high-throughput identification and quantitation of a large number of biological molecules, at the time, realizing the immunosensor reusable based on MEMS technology. These methods and some conclusions can be applicable to realize the system-on-chip (SOC) in the biological molecules testing

This paper established a new layered model to calculate the theoretical dispersion curve of SAWs propagating on the periodic porous SiO2 film on the Si substrate. In this model the periodic nanoporous SiO2 film is treated as transversal isotropic structure. Based on this model the properties of SAWs propagating on the surface of periodic porous SiO2 film in the directions of Si [110] and Si [100] are studied. The investigation on the characteristics of SAWs propagating on the periodic nanoporous film with different porosity, density as well as thickness is performed

In the further development of chemical mechanical polishing (CMP) process, it needs badly to have a sort of low polydispersion index (PDI) and high purity silica sol nanometer abrasives which can be stable for a long time. In this paper, through a large number of experiments, we have proposed the optimization process schemes and pyramid shape grow mode in preparing large particle size silica sol, realizing particle size controllable to grow, producing the silica sol of different specifications: 10 ~ 15nm, 20 ~ 25 nm, 30 ~ 40nm, 50 ~ 60nm, 80 ~ 90nm, 110 ~ 130nm, etc, among, the silica sol with large particle size has a low viscidity (1.431mpa middot s), low polydispersion index (1.002), high mechanical intension, satisfying for the need of mechanical polishing of CMP