1. Early prediction of product performance and yield via technology benchmark
- Author
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Jonghae Kim, Daeik Daniel Kim, Sangyeun Cho, Choongyeun Cho, and D. Lim
- Subjects
Engineering ,business.industry ,Silicon on insulator ,Hardware_PERFORMANCEANDRELIABILITY ,Phase-locked loop ,CMOS ,Product (mathematics) ,Yield (chemistry) ,Hardware_INTEGRATEDCIRCUITS ,Benchmark (computing) ,Electronic engineering ,Electrical measurements ,business ,Hardware_LOGICDESIGN ,Parametric statistics - Abstract
This paper presents a practical method to estimate IC product performance and parametric yield solely from a well-chosen set of existing electrical measurements intended for technology monitoring at an early stage of manufacturing. We demonstrate that the components of mmWave PLL and product-like logic performance in a 65 nm SOI CMOS technology are predicted within a 5% RMS error relative to mean.
- Published
- 2008
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