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Start Over Author "Sohn, D.K." Journal 2008 ieee international reliability physics symposium
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1. TDDB robustness of highly dense 65NM BEOL vertical natural capacitor with competitive area capacitance for RF and mixed-signal applications

Author

Fischer, A.H., primary, Lim, Y.K., additional, Riess, Ph., additional, Pompl, Th., additional, Zhang, B.C., additional, Chua, E.C., additional, Keller, W.W., additional, Tan, J.B., additional, Klee, V., additional, Tan, Y.C., additional, Souche, D., additional, Sohn, D.K., additional, and von Glasow, A., additional

Published
2008
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