1. Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications
- Author
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Middelburg, L.M., el Mansouri, B., Poelma, René H., Zhang, Kouchi, van Zeijl, H.W., Wei, J., Roy, A., and Gianchandani, Y.
- Subjects
Microelectromechanical systems ,optical readout ,Materials science ,large displacement behaviour ,Acoustics ,Spring system ,020206 networking & telecommunications ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Accelerometer ,Photodiode ,law.invention ,accelerometer ,Tilt (optics) ,law ,0202 electrical engineering, electronic engineering, information engineering ,Wafer ,Sensitivity (control systems) ,0210 nano-technology ,Beam (structure) ,non-linear MEMS - Abstract
This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.
- Published
- 2018
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