1. From Memory to Sensor: ultra-Low Power and High Selectivity Hydrogen Sensor Based on ReRAM Technology
- Author
-
Satoru Ito, Hisashi Shima, Shinichi Yoneda, Zhiqiang Wei, Hiroyuki Akinaga, Ken Kawai, Homma Kazunari, Satoru Fujii, Koji Katayama, and Yasuhisa Naitoh
- Subjects
Materials science ,Hydrogen ,chemistry.chemical_element ,02 engineering and technology ,01 natural sciences ,Hydrogen sensor ,chemistry.chemical_compound ,Stack (abstract data type) ,0103 physical sciences ,Electrical and Electronic Engineering ,010302 applied physics ,Resistive touchscreen ,business.industry ,Response time ,Disiloxane ,021001 nanoscience & nanotechnology ,Electronic, Optical and Magnetic Materials ,Resistive random-access memory ,Resist ,chemistry ,Electrode ,Optoelectronics ,0210 nano-technology ,business ,Selectivity ,Wireless sensor network - Abstract
We have fabricated a novel hydrogen sensor using optimized 0.18-μm ReRAM process. Our ReHsensor (Resistive Hydrogen Sensor) conforms with the ISO26142 standard in that it exhibits exceptional sensing capabilities, including high sensitivity, wide hydrogen concentration range (up to 4 vol.%) in air and N 2 ambient, high gas selectivity (no reaction with CH 4 , CO, CO 2 , CH 3 OH, and CH 3 COCH 3 ) and is immune to poisoning by SO 2 and hexamethyl disiloxane (HMDS). As it does not require a heater, the power consumption of the ReHsensor is very low, at 0.35 mW. We used this hydrogen sensor device to develop a battery-powered all-in-one wireless hydrogen sensor unit for IoT applications.
- Published
- 2018
- Full Text
- View/download PDF