1. In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners
- Author
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Zhiyong Chen, Mokrane Boudaoud, Stephane Regnier, Ali Bazaei, and Massoud Hemmasian Ettefagh
- Subjects
In situ ,Physics ,business.industry ,Small footprint ,010401 analytical chemistry ,Bandwidth (signal processing) ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Semiconductor ,Optoelectronics ,0210 nano-technology ,business ,Strain gauge ,Position sensor - Abstract
We address design, implementation, and characterization of semiconductor strain gauges as stage displacement sensors with small footprint for piezo-driven nanopositioners in differential actuation mode. The results indicate that in this actuation mode, a differential sensing strategy provides much better accuracy than the conventional non-differential schemes. The proposed differential sensor has a large sensitivity of $4.4\frac{V}{{\mu {\text{m}}}},$ 3σ-resolution of 2.4 nm, and bandwidth of 4 kHz.
- Published
- 2019
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