Author: "Xiong, Shisheng" / Journal: 2022 international workshop on advanced patterning solutions (iwaps) - Searchworks@Jio Institute Digital Library Search Results

Searchworks

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources

Your search keyword '"Xiong, Shisheng"' showing total 4 results

Start Over Author "Xiong, Shisheng" Journal 2022 international workshop on advanced patterning solutions (iwaps)

4 results on '"Xiong, Shisheng"'

1. Measurement and Calculation Method for Sub-20 nm Line and DSA Patterns

Author: Yang, Chi, primary, Wu, Zhiyong, additional, Dong, Qingshu, additional, Li, Zili, additional, Li, Weihua, additional, and Xiong, Shisheng, additional
Published: 2022
Full Text: View/download PDF

2. A Via/Contact Layout Decomposition Method for Directed Self-Assembly Based on Local Optimization

Author: Zhou, Hengyu, primary, Zhang, Tao, additional, Li, Sikun, additional, Tang, Ming, additional, Xiong, Shisheng, additional, and Wang, Xiangzhao, additional
Published: 2022
Full Text: View/download PDF

3. A Generation solving Layout Decomposition Method for DSA-MP Hybrid Lithography

Author: Zhang, Tao, primary, Zhou, Hengyu, additional, Li, Sikun, additional, Xiong, Shisheng, additional, and Wang, Xiangzhao, additional
Published: 2022
Full Text: View/download PDF

4. Improved Processing Window of Contact Hole with Directed Self-Assembly of Block Copolymer Blends

Author: Wu, Zhiyong, primary, Dong, Qingshu, additional, Xu, Xingran, additional, Li, Zili, additional, Liu, Yadong, additional, Ji, Shengxiang, additional, Li, Weihua, additional, Manhua, Shen, additional, and Xiong, Shisheng, additional
Published: 2022
Full Text: View/download PDF

Catalog

Books, media, physical & digital resources

See catalog results