1. Toward Lateral Length Standards at the Nanoscale Based on Diblock Copolymers
- Author
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Valentina Gianotti, Giulia Aprile, Matteo Fretto, Michele Laus, Gabriele Seguini, Natascia De Leo, Luca Boarino, Federico Ferrarese Lupi, Emanuele Enrico, Jørgen Garnæs, F. G. Volpe, Michele Perego, and Katia Sparnacci
- Subjects
Fabrication ,Materials science ,business.industry ,Nanotechnology ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Nanometrology ,Nanolithography ,Copolymer ,Miniaturization ,Optoelectronics ,Cylinder ,General Materials Science ,Thin film ,0210 nano-technology ,business ,Nanoscopic scale - Abstract
The self-assembly (SA) of diblock copolymers (DBCs) based on phase separation into different morphologies of small and high-density features is widely investigated as a patterning and nanofabrication technique. The integration of conventional top-down approaches with the bottom-up SA of DBCs enables the possibility to address the gap in nanostructured lateral length standards for nanometrology, consequently supporting miniaturization processes in device fabrication. On this topic, we studied the pattern characteristic dimensions (i.e., center-to-center distance L0 and diameter D) of a cylinder-forming polystyrene-b-poly( methyl methacrylate) PS-b-PMMA (54 kg mol–1, styrene fraction 70%) DBC when confined within periodic SiO2 trenches of different widths (W, ranging between 75 and 600 nm) and fixed length (l, 5.7 μm). The characteristic dimensions of the PMMA cylinder structure in the confined configurations were compared with those obtained on a flat surface (L0 = 27.8 ± 0.5 nm, D = 13.0 ± 1.0 nm). The an...
- Published
- 2017