1. Thermal Properties of Nanocrystalline Silicon Nanobeams
- Author
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Alejandro Martínez, Emigdio Chavez-Angel, Daniel Navarro-Urrios, Amadeu Griol, Martin F. Colombano, Clivia M. Sotomayor-Torres, Jeremie Maire, Guillermo Arregui, Jouni Ahopelto, Nestor E. Capuj, European Commission, Ministerio de Ciencia, Innovación y Universidades (España), Agencia Estatal de Investigación (España), Generalitat de Catalunya, Ministerio de Economía y Competitividad (España), and Generalitat Valenciana
- Subjects
Nanostructure ,Materials science ,Silicon ,thermal characterization methods ,Thermal characterization method ,phonons ,FOS: Physical sciences ,chemistry.chemical_element ,Applied Physics (physics.app-ph) ,02 engineering and technology ,Opto-mechanics ,Conductivity ,polycrystalline ,7. Clean energy ,Biomaterials ,Optomechanical ,03 medical and health sciences ,Thermal conductivity ,Mesoscale and Nanoscale Physics (cond-mat.mes-hall) ,Electrochemistry ,nanostructured materials ,Crystalline silicon ,Thermal characterization ,030304 developmental biology ,Condensed Matter - Materials Science ,0303 health sciences ,Condensed Matter - Mesoscale and Nanoscale Physics ,business.industry ,Free standings ,Nanocrystalline silicon ,Materials Science (cond-mat.mtrl-sci) ,silicon ,Physics - Applied Physics ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Thermal conduction ,Grain size ,Nano beams ,Electronic, Optical and Magnetic Materials ,optomechanics ,Nanocrystalline silicon films ,chemistry ,Characterization methods ,Optoelectronics ,0210 nano-technology ,business ,Optics (physics.optics) ,Physics - Optics ,thermal conduction - Abstract
Controlling thermal energy transfer at the nanoscale and thermal properties has become critically important in many applications since it often limits device performance. In this study, the effects on thermal conductivity arising from the nanoscale structure of free-standing nanocrystalline silicon films and the increasing surface-to-volume ratio when fabricated into suspended optomechanical nanobeams are studied. Thermal transport and elucidate the relative impact of different grain size distributions and geometrical dimensions on thermal conductivity are characterized. A micro time-domain thermoreflectance method to study free-standing nanocrystalline silicon films and find a drastic reduction in the thermal conductivity, down to values below 10 W m–1 K–1 is used, with a stronger decrease for smaller grains. In optomechanical nanostructures, this effect is smaller than in membranes due to the competition of surface scattering in decreasing thermal conductivity. Finally, a novel versatile contactless characterization technique that can be adapted to any structure supporting a thermally shifted optical resonance is introduced. The thermal conductivity data agrees quantitatively with the thermoreflectance measurements. This study opens the way to a more generalized thermal characterization of optomechanical cavities and to create hot-spots with engineered shapes at the desired position in the structures as a means to study thermal transport in coupled photon-phonon structures., This work was supported by the European Commission FET Open project PHENOMEN (G.A. Nr. 713450). ICN2 was supported by the S. Ochoa program from the Spanish Research Agency (AEI, grant no. SEV-2017-0706) and by the CERCA Programme / Generalitat de Catalunya. ICN2 authors acknowledge the support from the Spanish MICINN project SIP (PGC2018-101743-B-I00). D.N.U. and M.F.C. acknowledge the support of a Ramón y Cajal postdoctoral fellowship (RYC-2014-15392) and a Severo Ochoa studentship, respectively. E.C.A. acknowledges financial support from the EU FET Open Project NANOPOLY. (GA 829061). A.M. acknowledges support from Ministerio de Ciencia, Innovación y Universidades (grant PGC2018-094490-B, PRX18/00126) and Generalitat Valenciana (grants PROMETEO/2019/123, and IDIFEDER/2018/033).
- Published
- 2022
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