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Abstract Steaming‐assisted conversion route, a new strategy, is first adapted for the synthesis of highly crystallized anatase TiO2 2D inverse opal (IO) monolayer films, and then to Nb‐doped TiO2 and W‐doped TiO2 2D IO monolayer films. Pure water, ammonia, or HCl solutions are used as a source of steaming vapor to convert dry films of amorphous TiO2 IO, NbCl5/TiO2, and WCl6/TiO2 composite IOs into anatase TiO2, Nb‐doped TiO2, and W‐doped TiO2 IO films. This new strategy renders possible the doping of metal ions within the framework of the anatase TiO2 IO films under low temperature and liquid‐free conditions. Further, the ordered array structure of the IO films is also effectively retained. The low steaming conversion temperature allows high dopant rates of homogeneously distributed heteroatoms, resulting in Nb doping as high as ≈34%. The thus prepared TiO2, Nb‐doped TiO2, and W‐doped TiO2 anatase IO films are successfully used as active electrodes in the fabrication of electrochromic devices.