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This paper studies mechanism of the action occurring when one point ground fault happens through the analysis of an accident caused by one point ground fault in DC system. This paper points out that relay action will be possible in the case of one point ground fault in DC system through capacitor's discharging if the distributed capacitance reaches a certain magnitude. Finally this paper proposes corresponding solutions such as increasing relay interference and transforming the DC insulation monitoring devices, in order to avoid such accidents. [ABSTRACT FROM AUTHOR]

Continuum based CFD model is extended with slip wall approximation and rarefaction effect on viscosity, in an attempt to predict the pumping flow characteristics in low pressure plasma etch chambers. The flow regime inside the chamber ranges from slip wall (Kn ~ 0.01), and up to free molecular (Kn = 10). Momentum accommodation coefficient and parameters for Kn-modified viscosity are first calibrated against one set of measured pumping curve. Then the validity of this calibrated CFD models are demonstrated in comparison with additional pumping curves measured in chambers of different geometry configurations. More detailed comparison against DSMC model for flow conductance over slits with contraction and expansion sections is also discussed. [ABSTRACT FROM AUTHOR]