Author: "Dowell, M." / Journal: aip conference proceedings - Searchworks@Jio Institute Digital Library Search Results

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Author: Dowell, M. L., primary, Gilad, S., additional, Piasetzky, E., additional, Ho̸ibråten, S., additional, Baer, H. W., additional, Beise, E. J., additional, Bowman, J. D., additional, Dodson, G. W., additional, Irom, F., additional, Knudson, J. N., additional, Kyle, G. S., additional, Leitch, M. J., additional, Pham, L. D., additional, Redwine, R. P., additional, Rokini, S. H., additional, Smith, L. C., additional, Tieger, D. R., additional, and Wood, S. A., additional
Published: 1995
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Author: Adams, J. W., primary, Barletta, R. E., additional, Vanier, P. E., additional, Dowell, M. B., additional, Lennartz, J. W., additional, El-Genk, Mohamed S., additional, and Hoover, Mark D., additional
Published: 1994
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Author: Dowell, M. L., Cromer, C. L., Jones, R. D., Keenan, D. A., and Scott, T. R.
Subjects: *LASERS, *ULTRAVIOLET radiation, *PHOTOLITHOGRAPHY, *MEASUREMENT
Abstract: Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented; electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed. [ABSTRACT FROM AUTHOR]
Published: 2001

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