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Ionized Metal Plasma (IMP) deposition was used in depositing metal interconnection of titanium metal film. Inductively coupled plasma (ICP) was attached to chamber wall where it creates an electromagnetic field, thus, ionizing the sputtered metal atoms from target. The film morphology was observed by scanning electron microscope (SEM). Acoustic measurement of titanium film thickness showed that there was a comparable result with film resistance measured by 4‐point probe. Results show that higher plasma density would cause tensile properties on the film stress.

Oscillator strengths (f‐values) are calculated for five members of the F‐isoelectronic sequence, namely, P6+, Ar9+, Sc12+, Cr15+ and Co18+. The Single Configuration Hartree‐Fock program (SCHF) is used to generate the wave functions needed in the calculation of radiative transition probabilities and oscillator strengths (f‐values) for singly excited states in the studied ions. Specifically, the work includes the radiative transitions of the form n1l1 → n2l2. The transitions are classified into sets according to the values of l1 and l2, with n1 and n2 = 9, 8, …, 3. Both l1 and l2 are limited (here) to be less than 4. The angular momentum average scheme (AMA) is utilized for all the calculations of the radiative rates Ar’s, and f‐values. The trends of oscillator strengths with the effective charge (Zeff) and principal quantum numbers n1 and n2 of the upper and lower states are investigated. It is found that, the f‐values decrease as (1/n1)4.5 for dominant transitions in low‐ionized ions (P6+).

In most cases, electron‐ion (e/I) collisions proceed through the capture of free electrons by positive ions. The mode of radiationless capture which leads to the formation of intermediate doubly‐excited (d) states is known as resonance capture (RC) process. When d‐states stabilize by emission of radiation (x‐rays), dielectronic recombination (DR) is completed. The DR is an interesting process which is responsible for self‐cooling of thermal astrophysical and laboratory plasma.In the present work, the DR rates with cascade effect are computed for O‐like Al5+, Cl9+, Ti14+ and Zn22+ ions with 1s‐excitation. It is found that, the group of resonant states of the form 1s2s22p5nl (l = 0, 1, 2) has the highest contribution to the total DR rates for each of the previous ions. The peak values are found 1.01, 2.09, 3.12 and 3.46×10−14 cm3/sec at KT = 70, 120, 210 and 400 Ry for Al5+, Cl9+, Ti14+ and Zn22+ respectively. This indicates that the total DR rates increase as the effective charge of the ions increases, in ...

In thermal plasma, ion‐molecules collisions may take place through capture of an electron from molecular targets with simultaneous excitation of the charged ions. This process is known as resonant transfer excitation (RTE), which proceeds through the formation of Resonant (d) states. When these d‐states stabilize by emission of x‐rays, the sub‐process is known as RTEX. In this work, the RTEX cross sections (σRTEX) are calculated for Argon ions with q =8+, 11+ and 13+ (where; q refers to the degree of ionization), in their collisions with H2 or He targets. It is found that, σRTEX peaks at projectile energies E ≈ 18.86 MeV, 24.81MeV, and 28.48 MeV for Ar8+, Ar11+, and Ar13+ (L‐shell excitation), respectively.

The present work deals with the calculations of the cross sections of resonant transfer excitation followed by X‐rays (RTEX) in the collisions of N‐like P8+ and Ca13+ with He and H2 targets. The ab initio calculations are carried out using the adapted AMA scheme in the isolated resonance approximation (IRA). The adapted method was previously used in the calculations of RTEX cross sections for Be‐like Ca16+, where such preceding data were available. The results of Ca16+ were found in a good agreement with both experimental and theoretical works, in other coupling schemes, at low and high‐energy regions. However, only slight deviation was found at the middle energy region. Thus, this method is then applied in the calculations of RTEX cross sections for P8+ and Ca13+ ions with L‐shell excitations. The present calculations may be considered as a database for future comparison with experimental and theoretical data in other coupling schemes. The isoelectronic trends of RTEX cross sections with some atomic parameters, for P8+ and Ca13+, are discussed.